SAPPHIRE

Specification Item Value Tolerance Remark(s):
Standard Orientation C-Plane 0.3 (0001)
Special Orientation C+0.2to A 0.1 on request
Primary Flat Orientation A-Plane 0.3 (11-20)
Primary Flat Length 16.0mm 1.0mm
Secondary Flat on request
Diameter 50.80mm 0.15mm
Thickness(center point) 330-430m 25m
Total Thickness Variation(TTV) 15m
Local Thickness Variation(LTV) 5m,95 5mm x 5mm
Bow 20m
Front Surface Roughness(Ra) 5A MIL standard
Backside Surface Roughness(Ra) 1.0m ground
Chips 3x0.2mm max.
Wafer Edge Bevel 150m at 45
Cleanliness no stains and finger prints,ready for epi
Packaging cassettes of 25pcs or individually



Li2B4O7


Basic SAW Properties(45rotated X-cut)
Propagation Direction: Z-axis
EI.-Mech.Coupling Coefficient(K2): 0.0
Surface Wave Velocity: 3401m/s
Group Delay Time Temp.Coefficient: 0ppm/
Specification Item Value Tolerance
Orientation 45rotated X-cut 0.25
Orientation Flat perpendicular to Z-axis 0.25
Orientation Flat Length 22.0mm 0.20mm
Secondary Flat Position none/on request
Secondary Flat Length none/on request
Diameter 76.20mm 0.30mm
Thickness(center point) 350m500m 30m
Total Thickness Variation(TTV) 10m
Local Thickness Variation(lTV)within 5mm x 5mm 1.5m 95(PLTV)
Bow .-25mbow+25m
Warp 50m
Front Surface Roughness(Ra) 7A (mirror polished)
Backside Surface Roughness(Ra) 0.2m0.5m (GC# 1200 lapped

Other specifications are available on request.


3"LiTaO3 (LT)Wafers

Commmodity Czochraiski("CZ")Grown Lithium Tantalate(Single Crystal,Single Domain,Congruent Composition
Orientation 42rot.Y-cut0.25 38.8rot.Y-cut0.25 36rot.Y-cut0.25 X-cut0.25
Diameter 76.2mm0.3mm 76.2mm0.3mm 76.2mm0.3mm 76.2mm0.3mm
Orientation Flat 22mm2mm 22mm2mm 22mm2mm 22mm2mm
perpendicular toX0.25 perpendicular toX0.25 perpendicular toX0.25 parallel to Y-112.20.25
Second Flat 10mm3mm 10mm3mm 10mm3mm 10mm3mm
CW 900.5from OF CW 1050.5from OF CW 1200.5from OF CW 1500.5from OF
Thickness 350m30m 350m30m 350m30m 350m30m
500m30m 500m30m 500m30m 500m30m
Propagating Surface "+"-side,Ra7A "+"-side,Ra7A "+"-side,Ra7A "+"-side,Ra7A
Wafer Backside GC#1000 lapped & etched GC#1000 lapped & etched GC#1000 lapped & etched GC#1000 lapped & etched
0.2mRa0.5m 0.2mRa0.5m 0.2mRa0.5m 0.2mRa0.5m
TTV 10m
LTV 1.5m within an area of 5mm 5mm
PLTV 95%(3mm from edge excluded
Bow .-25 bow +25m
Warp 50m
Curie Temperature 605 2


4"LiTaO3 (LT)Wafers

Commmodity Czochraiski("CZ")Grown Lithium Tantalate(Single Crystal,Single Domain,Congruent Composition
Orientation 42rot.Y-cut0.25 38.8rot.Y-cut0.25 36rot.Y-cut0.25 X-cut0.25
Diameter 100.0mm0.5mm 100.0mm0.5mm 100.0mm0.5mm 100.0mm0.5mm
Orientation Flat 32mm2mm 32mm2mm 32mm2mm 32mm2mm
perpendicular toX0.25 perpendicular toX0.25 perpendicular toX0.25 parallel to Y-112.20.25
Second Flat 13mm3mm 13mm3mm 13mm3mm 13mm3mm
CW 900.5from OF CW 1050.5from OF CW 1200.5from OF CW 1500.5from OF
Thickness 350m30m 350m30m 350m30m 350m30m
500m30m 500m30m 500m30m 500m30m
Propagating Surface "+"-side,Ra7A "+"-side,Ra7A "+"-side,Ra7A "+"-side,Ra7A
Wafer Backside GC#1000 lapped & etched GC#1000 lapped & etched GC#1000 lapped & etched GC#1000 lapped & etched
0.2mRa0.5m 0.2mRa0.5m 0.2mRa0.5m 0.2mRa0.5m
TTV 12m
LTV 1.5m within an area of 5mm 5mm
PLTV 95%(3mm from edge excluded
Bow .-30 bow +30m
Warp 60m
Curie Temperature 605 2


3"LiNbO3 (LN)Wafers

Commmodity Czochraiski("CZ")Grown Lithium Niobate(Single,Congruent)
Orientation 64rotated.Y-cut0.25 127.86rot.Y-cut0.25 X-cut0.25
Diameter 76.2mm0.3mm 76.2mm0.3mm 76.2mm0.3mm
Orientation Flat 22mm2mm 22mm2mm 22mm2mm
perpendicular toX0.25 perpendicular toX0.25
Thickness 350m30m 350m30m 350m30m
500m30m 500m30m 500m30m
Propagating Surface "+"-side,Ra7A "+"-side,Ra7A "+"-side,Ra7A
Wafer Backside GC#1000 lapped & etched GC#1000 lapped & etched GC#1000 lapped & etched
0.2mRa0.5m 0.2mRa0.5m 0.2mRa0.5m
TTV 10m
LTV 1.5m within an area of 5mm 5mm
PLTV 95%(3mm from edge excluded
Bow .-25 bow +25m
Warp 50m
Curie Temperature 1142 2


4"LiNbO3 (LN)Wafers

Commmodity Czochraiski("CZ")Grown Lithium Niobate(Single,Congruent)
Orientation 64rotated.Y-cut0.25 127.86rot.Y-cut0.25 X-cut0.25
Diameter 100.0mm0.5mm 100.0mm0.5mm 100.0mm0.5mm
Orientation Flat 32mm2mm 32mm2mm 32mm2mm
perpendicular toX0.25 perpendicular toX0.25 perpendicular to Z0.25
Thickness 350m30m 350m30m 350m30m
500m30m 500m30m 500m30m
Propagating Surface "+"-side,Ra7A "+"-side,Ra7A "+"-side,Ra7A
Wafer Backside GC#1000 lapped & etched GC#1000 lapped & etched GC#1000 lapped & etched
0.2mRa0.5m 0.2mRa0.5m 0.2mRa0.5m
TTV 12m
LTV 1.5m within an area of 5mm 5mm
PLTV 95%(3mm from edge excluded
Bow .-30 bow +30m
Warp 60m
Curie Temperature 1142 2